February 03, 2026

Sumitomo Heavy Industries, Ltd. Advanced Technologies SBU (SHI Cryogenics Group), Sumitomo Heavy Industries Material Solutions Co., Ltd. , Sumitomo Heavy Industries -ATEX Co., Ltd. will be exhibiting at SEMICON Korea 2026, which will take place at COEX, Seoul, Korea, from February 11 to 13, 2026.

■Date： February 11 – February 13, 2026
■Location： COEX, Seoul, Korea
■Booth：
-Sumitomo Heavy Industries, Ltd. Advanced Technologies SBU (SHI Cryogenics Group)
B302, Hall B
- Joint exhibition by Sumitomo Heavy Industries Material Solutions and Sumitomo Heavy Industries ATEX
W801
■URL： SEMICON Korea 2026

■Exhibition Highlights

【Sumitomo Heavy Industries, Ltd. Advanced Technologies SBU (SHI Cryogenics Group)
We will exhibit panels featuring our energy‑efficient cryopumps, as well as our vacuum robots.

【Sumitomo Heavy Industries Material Solutions】
We will propose solutions for SiC utilizing world-class ion implantation equipment and ultra-high-frequency UV laser annealing equipment.
We will also display panels showcasing ion implantation systems and laser annealing systems tailored to various applications.

【Sumitomo Heavy Industries ATEX】
We will introduce irradiation solutions for Si and SiC utilizing high-energy ion irradiation technology.
Additionally, we will display panels featuring irradiation services tailored to target devices, such as carrier lifetime control and SF-KHII^®.

We look forward to welcoming you at our booth.