October 22, 2025

Sumitomo Heavy Industries, Ltd. Mechatronics division, Industrial Equipment Division, Precision Equipment Group (SHI Cryogenics Group) will be an exhibitor at SEMICON JAPAN 2025.

■Date：December 17 to December 19, 2025
■Location：Tokyo Big Sight, Tokyo, Japan
■Booth：W2637 (1st floor, West Exhibition Hall 2)
■URL：SEMICON Japan 2025

[Mechatronics Division]
We will present our nano-positioning stage technology designed for next-generation semiconductor manufacturing.

・CA / CS Series
Our unique technology achieves precise nanometer-level positioning in vacuum environments. Featuring an air-actuated design, it prevents heat generation within the vacuum chamber, and its ceramic-based construction ensures compatibility with electron beam systems.

・SA-GⅡ Series
Achieving high-precision, nanometer-level positioning, our uniquely developed reaction force management unit significantly reduces mechanical oscillation during dynamic motion, delivering exceptional accuracy and rapid stabilization.
With optional modules, we offer full custom integration of Z-axis, theta, and tilt functions, engineered to meet specialized user applications.

[Cryogenics Division]
We will be exhibiting an energy-efficient cryopump (actual unit on display) and a vacuum robot (panel display) at the event.

[Industrial Equipment Division]
We are exhibiting Reactive Nion© (Negative atomic oxygen (O⁻) Ion irradiation equipment) , our latest technology in oxidation equipment to form high quality oxide layers in low temperature as well as RPD (Reactive Plasma Deposition) and Superconducting Magnets for MCZ process (silicon wafer pulling process) in our booth (please refer to the panels inside it).

We look forward to seeing you at the event.