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In the ion implantation equipment market, the recent demand for high hydrogen pumping speed type cryopump has been increasing because of throughput enhancement and implantation dose shift improvement. Under such circumstances, we have developed high hydrogen pumping speed type cryopump based on the existing model which is not high hydrogen pumping speed type cryopump. Hydrogen pumping speed has been improved by designing the charcoal panel using pumping speed simulation and parametric change in the sticking coefficient of hydrogen molecule to charcoal. As a result, hydrogen pumping speed has been increased to 10000 L/s with cryopump ANSI10. Cryopumps with high hydrogen pumping speed need larger than normal refrigerators because of the large thermal loading. By developing the method for reducing the thermal loading on the activated charcoal panel, we succeeded in sharing the refrigerator with normal types and achieved energy saving.
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