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Sumitomo Heavy Industries Finetech, Ltd. (FTEC) has been manufacturing large-sized double-column type surface grinding machines over 40 years as a leading company in this field. And FTEC's products have been favorably accepted and held in the highest regard by FTEC's customers like the machine tool manufacturers, equipment manufacturers for flat panel display devices, semiconductor, automobile and mold. Recently, the number of parts that require highly accurate flatness over large surface areas, such as flat panel display televisions, has been increasing. This report introduces super precision surface grinding technologies for large size surface grinding machines, while mentioning the technology adopted for KSX-2530. The mechanism of critical factors have been surveyed, such as the cross sectional shape, the straightness of motion, the thermal deformation of workpieces. Also chatter vibration effecting cosmetic defects is shown. Finally the performance of convex and concave curve grinding is reported, which is an important factor in grinding the guide surface of machine tools.
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