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Precise motion and positioning system is a very important component in manufacturing equipments for semiconductor and flat panel display devices. Most of conventional manufacturing equipments have used servomotor and ball-screw drive method to obtain positioning accuracy and stability. Recently, as requirement for higher performance including positioning and scanning motion capabilities increases in particular semiconductor and flat panel display applications, the use of new drive methods with linear motor has been increased. This paper describes evaluated results of characteristics of servomotor/ball-screw drive method and linear motor drive method, in particular, regarding the performance including accuracy and stability of scanning motion under constant velocity command.
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