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According to the size increase of flat panel displays(FPDs), the drivers for linear motors capable of actuating larger XY-stages with high precision are required. SHI Control Systems, Ltd. has developed SDPH series driver for the high precision linear motor driver which can solve conflicting problems between larger capacity and high precision. SDPH series drivers are suitable for 500 to 3000[N] classes of linear motors and consist of 6 models by current output ratio on 9 to 60[Apeak]. Now, it is mainly shipped out for the 4th and the 5th generation FPD inspection machines. This report describes the background technologies for the high performance of SDPH series and the functions that support the high performance.
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