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SHI Control Systems, Ltd. has developed the MC-55
stage controller, which has a fully synchronous multiprocessing
architecture that can meet demands at the
ultraprecision stage. The controller has a motion control
processor and thrust control processors, and all of
the processors are connected with the bus in order to
centralize control of position, velocity, and thrust processing.
The centralized control software enables implementation
of multi-axis coordinated control and the disturbance
observer, which are required at the ultraprecision
stage. The power units are separated from the
control units in order to prevent noise that deteriorates
positioning accuracy. Synchronously operated high speed
processors enable a high-speed servo cycle and minimized
delay time. This paper presents an overview of
the interesting features of the MC-55 controller, the modular
system design, and the support system for adjustment
and maintenance.
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