SUMITOMO HEAVY INDUSTRIES TECHNICAL REVIEW
Development of MEMS Mirror Module
Tohru HIRATA and Koichiro TSUKANE



The recent growth of Internet traffic necessitates the urgent enhancement of a full-transparent optical network. Optical switches will constitute the key component of transparent transmission, especially for the access links.
Among the various types of optical switches, such as mechanical, liquid crystal, planer-light circuit, and MEMS (Micro Electro Mechanical Systems), MEMS-base switches are considered suitable for the high-port switch fabric. We have been developing a mirror-actuator module for an optical switch based on MEMS technology. This report presents the basic features of the mirror module and some of the actuation test results.