In response to the development of high-performance semiconductor devices and liquid crystal panels, the requirements for XY stages of high precision and quick movement have become more demanding year by year.
Our company has been developing various types of XY stages designed with the basic concept of an H-shape frictionless sliding structure by adopting adirect-drive mechanism with air-guides and linear motors.
This report presents primarily the basic, element and peripheral technologies required for the H-shape stages and outlines the high-speed Z-axis mechanism that has recently been attracting attention.