High-speed UV-laser drill system has been developed for package
substrate processing as a new generation program of the laser system
division. As a laser source, diode-pumped all-solid-state laser
with third harmonic crystal has been applied. A high-speed-switching
electroptic instrument is placed along the output laser beam axis
in order to switch the polarization quickly, which enables the polarization
beam splitter to divide the laser beam to the different axis alternatively
for the efficient processing. As a result, the throughput reached
up to 1000 holes/second for the drilled hole diameter of 50m with
the pitch of 0.5mm on the substrate. At the same time, the standard
deviation of the hole diameter was reduced to }2m(3) and the roundness
was within 5 (3) by optimizing the beam transfer optics system.
The hole position deviation on the substrate was decreased within
10m by the temperature control system in the scanning mirror box.
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