This paper presents a precise XY-stage system specially designed for laser fine-cutting system.

Analysis of dynamic behavior of the stage system, control system design and some experimental results are described. The stage system is guided on a base plate by linear motion bearings and driven by simultaneous operation of three linear motors in the x-, y- and θz-directions. The manuscript discusses the design of control system providing precise motion accuracy, using a force disturbance observer and decoupling compensation based on analysis of stage dynamics. Experimental results indicate that the proposed servo control method successfully reduces trajectory error for some motion command.