Energy conservation (multi operation), stable performance and reduced down time (exhaust performance, etc.)
Cryopumps are high vacuum pumps that have an ultra-cold temperature panel installed inside a vacuum vessel. Gas molecules inside the vessel are condensed or absorbed in the panel and then discharged. They are utilized for semiconductor manufacturing equipment and the like, which require a clean environment. The high reliability, arising from the use of the GM refrigerator, which is a forte of the SHI Group, is a feature of this product line.
This is a type of vacuum pump.
Vacuum pumps are categorized into gas transporting types and gas accumulating types. They are also classified into roughing vacuum pumps and high vacuum pumps, according to the operating pressure range. Roughing vacuum pumps may be oil-sealed rotary vacuum pumps or dry roughing vacuum pumps. High vacuum pumps can be turbo molecular pumps, cryopumps, sputter ion pumps or oil diffusion pumps.
Cryopumps have the following characteristics:
The SHI Group sells two brands of cryopumps, SICERA® and Marathon®.
SICERA® is an abbreviation of the Sumitomo Inverter-integrated cryopump, which has an energy reduction advantage and the following features:
Marathon®, the other brand of pump, is produced by Sumitomo (SHI) Cryogenics of America, Inc., and it has the following features:
Similar to cryogenic freezers, the global network of the SHI Group includes sites in the United States (three locations), United Kingdom, Germany, and China, where sales and service operations are conducted. We are about to establish a support framework for the growing Asian market as well.
|SICERA®||Multiple unit operation is possible, offering energy saving effects with inverter control.|
|Marathon®||Supports a wide range of sizes.|