Laser annealing equipment for FPD and semiconductors
FPDs: Optimum systems that accommodate a variety of glass sizes, with successful domestic production for all components, including the SHI Group's proprietary technologies, such as two-laser and two-chamber systems, etc.
Semiconductors: This solid state laser annealing equipment makes it possible to perform unique double pulse processes. The development of next generation processes is supported with high repeating rates and a high pulse energy stability that are maintenance free and in a compact design.
|Excimer laser annealing equipment for liquid crystals||The ELA series of products was developed in the pursuit of modularization, with our own laser and optical systems. We provide systems optimally suited for the requirements of our customers.|
|Solid state laser annealing equipment for semiconductors||High performance solid state laser annealing equipment that supports double pulse processes. This product promotes the development of next generation processes.|