SHX-III/S (single wafer high current ion implanter)
This is the latest compact model in the SHX series with the combination of beam scans and mechanical scans, incorporated for the first time in the world, in order to make high precision and high quality implantations with extremely low energy level ions.
|High current ion implanter series||A global standard is delivered for high current equipment with a superior beam quality for extremely low energy sources and high currents|
|Medium current ion implanter series||The "MC3 series" of products control many parameters, such as energy, dosage, implantation angle, etc., with high precision.|
|High energy ion implanter series||The "UHE" line of products feature the 18 stage acceleration resonator that responds to an energy range up to 8.0MeV.|