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Introduction to Precision Control Machinery
>> Precision Positioning Machines
Precision Positioning Machines
What are Positioning Machines?
Positioning machines are equipment used to accurately move an object on a stage back and forth and sideways in order to accurately position it at a working location. Ball screws are used within a certain range and others are used when more precise linear motors are required, depending on the distance (stroke) and precision (resolution) of movement. Manufacturing equipment or inspection equipment for semiconductors, which are manufactured with increasingly higher densities and microfabricated, as well as equipment for liquid crystal displays, require a level of accuracy on the order of nanometers (one millionth of a millimeter). Our precision positioning machines respond to these requirements and are essential components for the semiconductors and liquid crystal displays of the future.
Principal Applications
Semiconductor manufacturing and inspection equipment:
Exposure equipment, wafer inspection equipment, etc.
Liquid crystal panel manufacturing and inspection equipment:
Exposure equipment, resist application equipment, inspection equipment, repairing equipment, etc.
Applicable Markets
Our precision positioning machines are adopted for use in manufacturing and inspection equipment for semiconductors, liquid crystal panels, and optical communication components. We have recently been collaborating with equipment manufacturers in an effort to develop the next generation systems in the semiconductor and liquid crystal display industries.
Our products target fields that require ultraprecision, depicted in the diagram to the right.
Delivered as Highly Complete Systems
We are selling the Nanoplane series of precision positioning machines. From the structure of stages to high precision linear motors and control devices, these machines are our proprietary development. Our strength lies in our ability to offer highly complete systems comprising positioning machines that are optimally suited for a variety of applications.
Ultraprecision XY Stages
Large Scale XY Stages for Liquid Crystal Displays
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