Introduction to Precision Control Machinery

Cryocoolers

These compact cooling machines can readily offer cryogenic conditions of between 4 K (-269 °C) to 80 K (-193 °C). They are used in MRI (magnetic resonance imaging) systems of medical equipment, as well as in semiconductor manufacturing equipment.

Precision Positioning Machines

These key components are used for manufacturing equipment and test equipment for semiconductors and liquid crystal panels. An object placed on the stage is moved back and forth and sideways to accurately position it at a working location. The positional accuracy is on the order of nanometers (one millionth of a millimeter).

Cyclotrons for PET

This is essential equipment for cancer examinations using PET, which became eligible for Japanese National Health Insurance coverage from April 2002. In addition to cancer diagnosis, PET's scope of application is starting to spread to the examination and diagnosis of heart and brain conditions.

Laser Annealing Systems

This technology is used in the liquid crystal display manufacturing process to modify the properties of the silicon coating on glass substrates to polycrystal silicon. Because this is done by applying a laser beam, crystallization occurs at lower temperatures and in a shorter time, thereby making it possible to mass produce liquid crystal displays in a sophisticated process using moderately priced glass substrates.

Semiconductor Sealing Machines

This equipment is used in one semiconductor manufacturing process to solidify semiconductor chips with resin in order to protect them from mechanical stresses and the effects of temperature or humidity.

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