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Clean Room System
Clean room systems, available from the SHI Group, reduce running costs with the proprietary air conditioning system, "Cle-Eco®". Highly accurate control of temperature and humidity is also possible. Designs suitable for internal facilities at existing manufacturing plants and offices are also provided. Furthermore, in cases where the processing accuracy of nanometer orders is required by our customers, the SHI Group also offers precision temperature regulating equipment, Thermal Cube®.
Characteristics of clean room systems
- 1Energy conservation
The proprietary air conditioning system, "Cle-Eco®" reduces running costs by up to 60% (in comparison with products of the SHI Group).
- 2Highly accurate temperature regulation is possible
The system is capable of not only controlling cleanliness but also the temperature and humidity with a high accuracy (temperature ±1℃; humidity ±5%).
- 3Low humidity environment also realized
A dew point temperature of -60 ℃ can be realized.
- 4Adaptable to existing facilities in existing building structures
Designs suitable for internal facilities at existing manufacturing plants and offices are also provided.
- 5Capable of working with small areas
It is possible to work with small scale clean rooms, even those that have a floor area less than 100m2. Costs can be reduced by minimizing the clean zones.
- 6A variety of clean room related equipment also available
Many types of related equipment are manufactured by the SHI Group, and can be installed at a low cost.
Features of Thermal Cube®
- 1Energy conservation
Energy saving types requiring no electric heater, using our proprietary refrigerant reheating method, are also available.
- 2Accurate temperature regulation(*) is possible
The control of temperatures to ±0.5℃ and ±0.1℃, as well as the control of humidity to ±2% and ±5% in the normal temperature zone, is possible with standard systems.
The high accuracy types are capable of controls with an accuracy of ±0.05℃.
- 3Capable of handling various needs
A line of products that feature a diverse range of specifications, such as energy saving types, low humidity types and large air flow types, is available.
These systems can be used for a variety of applications. Furthermore, there is an integrated precision temperature regulating system, "Uni Thermal Cube", which features temperature control functions for the three fluid types of air, water and compressed air, packaged in a single housing.
- 4Examples of numerous applications
Partitions that cater to the required accuracies and facilities, such as simplified plastic curtain methods and thermal insulation panel methods, as well as equipment linked automatic shutter fitted types, can be provided.
- 5Air flow and temperature distribution simulations
Air flow analysis is performed in order to create highly reliable designs under a variety of conditions, with proposals for optimum systems for our customers.
- *Notes on accurate temperature regulation
Accurate temperature regulation is an air conditioning method used to very accurately control the temperature and humidity. Accurate temperature regulation is one of the essential conditions for achieving stable quality, as more and more highly value added products are produced and processed.
For instance if the temperature at a site where precision processing is being performed fluctuates by 1℃, a steel block measuring 100mm would shrink by about 1μm. Other than this, stability of the temperature and humidity are important elements in securing high quality in various processes, impacting on certain aspects, such as the refraction of light or viscosity of solvents.
Clean room systems
Systems optimal for the facilities and processes of our customers are proposed, with technical capabilities that have been nurtured through ample practical experiences since 1974.
Clean room related equipment
Technical capabilities nurtured with the manufacturing of clean room systems are used to develop and manufacture related equipment.
Precision temperature control facilities
Highly accurate temperature and humidity control is possible.
The SHI Group responds to the needs of our customers with an assortment of products.
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- Products for inquiries
- Clean Room System