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The high power excimer laser has been developed for
TFT (Thin Film Transistor) LCD (Liquid Crystal Display)
annealing. We had supplied to the market up to the 240
watts (800 mJ, 300 Hz) average power excimer laser for
industrial use. We are going to add the 300 watts (1000
mJ, 300 Hz) average power laser for our line-up. This
300 watts new laser is based on the 240 watts laser, but
improved some points. In our test, 300 watts servo operation
is able to oscillate over 50 million pulses with almost
less than 1.2 percent for σ output stability. Our special
gas control for better performance had been able
to oscillate over 45 million pulses in 310 watts servo
operation with almost less than 1.0 percent for σoutput
stability. We are confident that it will be possible for this
laser to produce over 300 watts average power with
good stability. |
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