In response to the development of high-performance semiconductor
devices and liquid crystal panels, the requirements for XY stages
of high precision and quick movement have become more demanding
year by year.
Our company has been developing various types of XY stages designed
with the basic concept of an H-shape frictionless sliding structure
by adopting adirect-drive mechanism with air-guides and linear motors.
This report presents primarily the basic, element and peripheral
technologies required for the H-shape stages and outlines the high-speed
Z-axis mechanism that has recently been attracting attention.
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